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WHITE LIGHT SOURCE AND ILLUMINATION APPARATUS FOR LIGHTING IN LITHOGRAPHY PROCESS
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Abstract
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Inventors
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WHITE LIGHT SOURCE AND ILLUMINATION APPARATUS FOR LIGHTING IN LITHOGRAPHY PROCESS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 3 May 2021
Patent Information
| Application ID | 202127020243 |
| Date of Application | 03/05/2021 |
Documents
| Name | Date |
|---|---|
| 202127020243-IntimationOfGrant19-12-2023.pdf | 19/12/2023 |
| 202127020243-PatentCertificate19-12-2023.pdf | 19/12/2023 |
| 202127020243-CLAIMS [29-08-2022(online)].pdf | 29/08/2022 |
| 202127020243-FER_SER_REPLY [29-08-2022(online)].pdf | 29/08/2022 |
| 202127020243-OTHERS [29-08-2022(online)].pdf | 29/08/2022 |
| 202127020243-FORM 3 [25-08-2022(online)].pdf | 25/08/2022 |
| 202127020243-Certified Copy of Priority Document [23-08-2022(online)].pdf | 23/08/2022 |
| 202127020243-certified copy of translation [23-08-2022(online)].pdf | 23/08/2022 |
| 202127020243-FORM 3 [29-04-2022(online)].pdf | 29/04/2022 |
| 202127020243-FER.pdf | 08/03/2022 |
| 202127020243-FORM 3 [02-11-2021(online)].pdf | 02/11/2021 |
| 202127020243.pdf | 19/10/2021 |
| Abstract1.jpg | 19/10/2021 |
| 202127020243-AMMENDED DOCUMENTS [21-05-2021(online)].pdf | 21/05/2021 |
| 202127020243-FORM 13 [21-05-2021(online)].pdf | 21/05/2021 |
| 202127020243-MARKED COPIES OF AMENDEMENTS [21-05-2021(online)].pdf | 21/05/2021 |
| 202127020243-FORM-26 [13-05-2021(online)].pdf | 13/05/2021 |
| 202127020243-Proof of Right [13-05-2021(online)].pdf | 13/05/2021 |
| 202127020243-COMPLETE SPECIFICATION [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-DECLARATION OF INVENTORSHIP (FORM 5) [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-DRAWINGS [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-FIGURE OF ABSTRACT [03-05-2021(online)].jpg | 03/05/2021 |
| 202127020243-FORM 1 [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-FORM 18 [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-REQUEST FOR EXAMINATION (FORM-18) [03-05-2021(online)].pdf | 03/05/2021 |
| 202127020243-STATEMENT OF UNDERTAKING (FORM 3) [03-05-2021(online)].pdf | 03/05/2021 |
