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WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS
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Abstract
Information
Inventors
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Specification
Documents
WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 29 May 2018
Patent Information
| Application ID | 201817020041 |
| Date of Application | 29/05/2018 |
Documents
| Name | Date |
|---|---|
| 201817020041-FER.pdf | 18/10/2021 |
| 201817020041-FORM-26 [24-06-2021(online)].pdf | 24/06/2021 |
| 201817020041-PETITION UNDER RULE 137 [24-06-2021(online)].pdf | 24/06/2021 |
| 201817020041-Proof of Right [24-06-2021(online)].pdf | 24/06/2021 |
| 201817020041-FORM 18 [12-10-2019(online)].pdf | 12/10/2019 |
| 201817020041-FORM 3 [13-09-2018(online)].pdf | 13/09/2018 |
| 201817020041-Verified English translation (MANDATORY) [13-09-2018(online)].pdf | 13/09/2018 |
| 201817020041.pdf | 01/08/2018 |
| abstract.jpg | 12/07/2018 |
| 201817020041-COMPLETE SPECIFICATION [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-DECLARATION OF INVENTORSHIP (FORM 5) [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-DRAWINGS [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-FORM 1 [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-PRIORITY DOCUMENTS [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-STATEMENT OF UNDERTAKING (FORM 3) [29-05-2018(online)].pdf | 29/05/2018 |
| 201817020041-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [29-05-2018(online)].pdf | 29/05/2018 |
