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USE OF SURFACTANTS HAVING AT LEAST THREE SHORT CHAIN PERFLUORINATED GROUPS FOR MANUFACTURING INTEGRATED CIRCUITS HAVING PATTERNS WITH LINE SPACE DIMENSIONS BELOW 50NM
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Abstract
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USE OF SURFACTANTS HAVING AT LEAST THREE SHORT CHAIN PERFLUORINATED GROUPS FOR MANUFACTURING INTEGRATED CIRCUITS HAVING PATTERNS WITH LINE SPACE DIMENSIONS BELOW 50NM
PCT NATIONAL PHASE APPLICATION
Published
Filed on 17 July 2013
Patent Information
| Application ID | 5693/CHENP/2013 |
| Date of Application | 17/07/2013 |
Documents
| Name | Date |
|---|---|
| 5693-CHENP-2013-AbandonedLetter.pdf | 17/10/2019 |
| 5693-CHENP-2013-FER.pdf | 15/04/2019 |
| Form 3 [08-06-2016(online)].pdf | 08/06/2016 |
| 5693-CHENP-2013 CORRESPONDENCE OTHERS 05-08-2015.pdf | 05/08/2015 |
| 5693-CHENP-2013 FORM-3 05-08-2015.pdf | 05/08/2015 |
| 5693-CHENP-2013 CORRESPONDENCE OTHERS 10-04-2015.pdf | 10/04/2015 |
| 5693-CHENP-2013 FORM-3 10-04-2015.pdf | 10/04/2015 |
| 5693-CHENP-2013 CORRESPONDENCE OTHERS 23-06-2014.pdf | 23/06/2014 |
| 5693-CHENP-2013 FORM-3 23-06-2014.pdf | 23/06/2014 |
| 5693-CHENP-2013 CORRESPONDENCE OTHERS 17-10-2013.pdf | 17/10/2013 |
| 5693-CHENP-2013 FORM-3 17-10-2013.pdf | 17/10/2013 |
| 5693-CHENP-2013 ASSIGNMENT 20-08-2013.pdf | 20/08/2013 |
| 5693-CHENP-2013 CORRESPONDENCE OTHERS 20-08-2013.pdf | 20/08/2013 |
| 5693-CHENP-2013.pdf | 25/07/2013 |
| FORM 3.pdf | 19/07/2013 |
| FORM 5.pdf | 19/07/2013 |
| GPOA.pdf | 19/07/2013 |
| SPECIFICATION.pdf | 19/07/2013 |
