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USE OF COMPOSITIONS COMPRISING A SURFACTANT AND A HYDROPHOBIZER FOR AVOIDING ANTI PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE SPACE DIMENSIONS OF 50 NM OR BELOW
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USE OF COMPOSITIONS COMPRISING A SURFACTANT AND A HYDROPHOBIZER FOR AVOIDING ANTI PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE SPACE DIMENSIONS OF 50 NM OR BELOW
PCT NATIONAL PHASE APPLICATION
Published
Filed on 2 July 2015
Patent Information
| Application ID | 3929/CHENP/2015 |
| Date of Application | 02/07/2015 |
Documents
| Name | Date |
|---|---|
| Form 3 [28-06-2016(online)].pdf | 28/06/2016 |
| 3929-CHENP-2015 CORRESPONDENCE OTHERS 19-08-2015.pdf | 19/08/2015 |
| 3929-CHENP-2015 FORM-3 19-08-2015.pdf | 19/08/2015 |
| 3929-CHENP-2015 CORRESPONDENCE OTHERS 15-07-2015.pdf | 15/07/2015 |
| 3929-CHENP-2015 FORM-1 15-07-2015.pdf | 15/07/2015 |
| PD016417IN-NP FORM 3.pdf | 06/07/2015 |
| PD016417IN-NP FORM 5.pdf | 06/07/2015 |
| PD016417IN-NP GPOA.pdf | 06/07/2015 |
| PD016417IN-NP SPEC FOR FILING.pdf | 06/07/2015 |
