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UNBALANCED TYPE DE/RF BIASED MAGNETRON SPUTTERING NANO-FILM DEPOSITION SYSTEM
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Abstract
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UNBALANCED TYPE DE/RF BIASED MAGNETRON SPUTTERING NANO-FILM DEPOSITION SYSTEM
ORDINARY APPLICATION
Published
Filed on 4 September 2020
Patent Information
| Application ID | 202031038219 |
| Date of Application | 04/09/2020 |
Documents
| Name | Date |
|---|---|
| 202031038219-(04-09-2020)-CLAIMS.pdf | 04/09/2020 |
| 202031038219-(04-09-2020)-DESCRIPTION (COMPLETE).pdf | 04/09/2020 |
| 202031038219-(04-09-2020)-DRAWINGS.pdf | 04/09/2020 |
| 202031038219-(04-09-2020)-FORM-1.pdf | 04/09/2020 |
| 202031038219-(04-09-2020)-FORM-2.pdf | 04/09/2020 |
| 202031038219-(04-09-2020)-FORM-3.pdf | 04/09/2020 |
