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THROUGH-SILICON-VIA FABRICATION IN PLANAR QUANTUM DEVICES
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Abstract
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THROUGH-SILICON-VIA FABRICATION IN PLANAR QUANTUM DEVICES
PCT NATIONAL PHASE APPLICATION
Published
Filed on 21 October 2021
Patent Information
| Application ID | 202147047846 |
| Date of Application | 21/10/2021 |
Documents
| Name | Date |
|---|---|
| 202147047846-ABSTRACT [21-09-2022(online)].pdf | 21/09/2022 |
| 202147047846-CLAIMS [21-09-2022(online)].pdf | 21/09/2022 |
| 202147047846-COMPLETE SPECIFICATION [21-09-2022(online)].pdf | 21/09/2022 |
| 202147047846-DRAWING [21-09-2022(online)].pdf | 21/09/2022 |
| 202147047846-FER_SER_REPLY [21-09-2022(online)].pdf | 21/09/2022 |
| 202147047846-FER.pdf | 23/03/2022 |
| 202147047846-FORM 3 [22-03-2022(online)].pdf | 22/03/2022 |
| 202147047846-Proof of Right [07-03-2022(online)].pdf | 07/03/2022 |
| 202147047846-COMPLETE SPECIFICATION [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-DECLARATION OF INVENTORSHIP (FORM 5) [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-DRAWINGS [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-FORM 1 [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-FORM 18 [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-POWER OF AUTHORITY [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-REQUEST FOR EXAMINATION (FORM-18) [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846-STATEMENT OF UNDERTAKING (FORM 3) [21-10-2021(online)].pdf | 21/10/2021 |
| 202147047846.pdf | 21/10/2021 |
