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TEMPERATURE AND SLURRY FLOW RATE CONTROL IN CMP
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Abstract
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TEMPERATURE AND SLURRY FLOW RATE CONTROL IN CMP
PCT NATIONAL PHASE APPLICATION
Published
Filed on 18 January 2023
Patent Information
| Application ID | 202347003540 |
| Date of Application | 18/01/2023 |
Documents
| Name | Date |
|---|---|
| 202347003540-FORM 3 [19-12-2023(online)].pdf | 19/12/2023 |
| 202347003540-CLAIMS [05-10-2023(online)].pdf | 05/10/2023 |
| 202347003540-FER_SER_REPLY [05-10-2023(online)].pdf | 05/10/2023 |
| 202347003540-OTHERS [05-10-2023(online)].pdf | 05/10/2023 |
| 202347003540-FORM 3 [02-08-2023(online)].pdf | 02/08/2023 |
| 202347003540-Correspondence_Assignment And Power Of Attorney_01-06-2023.pdf | 01/06/2023 |
| 202347003540-FER.pdf | 06/04/2023 |
| 202347003540-FORM-26 [31-01-2023(online)].pdf | 31/01/2023 |
| 202347003540-FORM 3 [23-01-2023(online)].pdf | 23/01/2023 |
| 202347003540-COMPLETE SPECIFICATION [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-DECLARATION OF INVENTORSHIP (FORM 5) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-DRAWINGS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-FORM 1 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-FORM 18 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-PRIORITY DOCUMENTS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-PROOF OF RIGHT [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-REQUEST FOR EXAMINATION (FORM-18) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540-STATEMENT OF UNDERTAKING (FORM 3) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003540.pdf | 18/01/2023 |
