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SUBSTRATE SUPPORT DEVICE AND EXPOSURE DEVICE
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Abstract
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SUBSTRATE SUPPORT DEVICE AND EXPOSURE DEVICE
PCT NATIONAL PHASE APPLICATION
Published
Filed on 9 March 2015
Patent Information
| Application ID | 1909/DELNP/2015 |
| Date of Application | 09/03/2015 |
Documents
| Name | Date |
|---|---|
| 1909-DELNP-2015-RELEVANT DOCUMENTS [19-09-2023(online)].pdf | 19/09/2023 |
| 1909-DELNP-2015-IntimationOfGrant08-03-2022.pdf | 08/03/2022 |
| 1909-DELNP-2015-PatentCertificate08-03-2022.pdf | 08/03/2022 |
| 1909-DELNP-2015-FORM 3 [03-04-2019(online)].pdf | 03/04/2019 |
| 1909-DELNP-2015-FORM 3 [13-02-2019(online)].pdf | 13/02/2019 |
| 1909-DELNP-2015-Correspondence-261018.pdf | 29/10/2018 |
| 1909-DELNP-2015-Power of Attorney-261018.pdf | 29/10/2018 |
| 1909-DELNP-2015-CLAIMS [17-10-2018(online)].pdf | 17/10/2018 |
| 1909-DELNP-2015-FER_SER_REPLY [17-10-2018(online)].pdf | 17/10/2018 |
| 1909-DELNP-2015-OTHERS [17-10-2018(online)].pdf | 17/10/2018 |
| 1909-DELNP-2015-FORM 3 [10-09-2018(online)].pdf | 10/09/2018 |
| 1909-DELNP-2015-FER.pdf | 31/07/2018 |
| 1909-delnp-2015-Correspodence Others-(04-08-2015).pdf | 04/08/2015 |
| 1909-delnp-2015-Form-1-(04-08-2015).pdf | 04/08/2015 |
| 1909-delnp-2015-Form-3-(04-08-2015).pdf | 04/08/2015 |
| 1909-DELNP-2015.pdf | 15/03/2015 |
| 1909-DELNP-2015-Correspondance Others-(13-03-2015).pdf | 13/03/2015 |
| 1909-DELNP-2015-English-Translation-(13-03-2015).pdf | 13/03/2015 |
| PD015587IN-NP FIGURES.pdf | 13/03/2015 |
| PD015587IN-NP FINAL FIGURES.pdf | 13/03/2015 |
| PD015587IN-NP FORM 3.pdf | 13/03/2015 |
| PD015587IN-NP FORM 5.pdf | 13/03/2015 |
| PD015587IN-NP NIKON CORPORATION_NEW GPOA.pdf | 13/03/2015 |
| PD015587IN-NP SPEC FOR E-FILING.pdf | 13/03/2015 |
| PD015587IN-NP FIGURES.pdf ONLINE | 10/03/2015 |
| PD015587IN-NP FINAL FIGURES.pdf ONLINE | 10/03/2015 |
| PD015587IN-NP FORM 3.pdf ONLINE | 10/03/2015 |
| PD015587IN-NP FORM 5.pdf ONLINE | 10/03/2015 |
| PD015587IN-NP NIKON CORPORATION_NEW GPOA.pdf ONLINE | 10/03/2015 |
| PD015587IN-NP SPEC FOR E-FILING.pdf ONLINE | 10/03/2015 |
