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SUBSTRATE PROCESSING APPARATUS AND METHOD
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Abstract
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Specification
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SUBSTRATE PROCESSING APPARATUS AND METHOD
PCT NATIONAL PHASE APPLICATION
Published
Filed on 22 June 2022
Patent Information
| Application ID | 202217035798 |
| Date of Application | 22/06/2022 |
Documents
| Name | Date |
|---|---|
| 202217035798-FORM 18 [07-11-2023(online)].pdf | 07/11/2023 |
| 202217035798-FORM 3 [19-09-2022(online)].pdf | 19/09/2022 |
| 202217035798-Proof of Right [19-09-2022(online)].pdf | 19/09/2022 |
| 202217035798-COMPLETE SPECIFICATION [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-DECLARATION OF INVENTORSHIP (FORM 5) [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-DRAWINGS [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-FORM 1 [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-POWER OF AUTHORITY [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-PRIORITY DOCUMENTS [22-06-2022(online)].pdf | 22/06/2022 |
| 202217035798-STATEMENT OF UNDERTAKING (FORM 3) [22-06-2022(online)].pdf | 22/06/2022 |
