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SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND EXHAUST GAS PROCESSING METHOD THEREFOR
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SUBSTRATE PROCESSING APPARATUS HAVING EXHAUST GAS DECOMPOSER, AND EXHAUST GAS PROCESSING METHOD THEREFOR
DIVISIONAL PCT NATIONAL PHASE APPLICATION
Published
Filed on 8 September 2021
Patent Information
| Application ID | 202128040756 |
| Date of Application | 08/09/2021 |
Documents
| Name | Date |
|---|---|
| 202128040756-FORM 3 [16-11-2022(online)].pdf | 16/11/2022 |
| 202128040756-Information under section 8(2) [16-11-2022(online)].pdf | 16/11/2022 |
| 202128040756-PETITION UNDER RULE 137 [16-11-2022(online)].pdf | 16/11/2022 |
| 202128040756-CLAIMS [15-11-2022(online)].pdf | 15/11/2022 |
| 202128040756-COMPLETE SPECIFICATION [15-11-2022(online)].pdf | 15/11/2022 |
| 202128040756-FER_SER_REPLY [15-11-2022(online)].pdf | 15/11/2022 |
| 202128040756-Verified English translation [08-08-2022(online)].pdf | 08/08/2022 |
| 202128040756-FER.pdf | 17/05/2022 |
| 202128040756-FORM 3 [28-02-2022(online)].pdf | 28/02/2022 |
| 202128040756.pdf | 24/02/2022 |
| Abstract1.jpg | 24/02/2022 |
| 202128040756-FORM-26 [09-12-2021(online)].pdf | 09/12/2021 |
| 202128040756-Proof of Right [09-12-2021(online)].pdf | 09/12/2021 |
| 202128040756-COMPLETE SPECIFICATION [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-DECLARATION OF INVENTORSHIP (FORM 5) [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-DRAWINGS [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-FIGURE OF ABSTRACT [08-09-2021(online)].jpg | 08/09/2021 |
| 202128040756-FORM 1 [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-FORM 18 [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-PRIORITY DOCUMENTS [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-REQUEST FOR EXAMINATION (FORM-18) [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-STATEMENT OF UNDERTAKING (FORM 3) [08-09-2021(online)].pdf | 08/09/2021 |
| 202128040756-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [08-09-2021(online)].pdf | 08/09/2021 |
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