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SUBSTRATE LOADING IN AN ALD REACTOR
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Abstract
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SUBSTRATE LOADING IN AN ALD REACTOR
PCT NATIONAL PHASE APPLICATION
Published
Filed on 27 April 2015
Patent Information
| Application ID | 3527/DELNP/2015 |
| Date of Application | 27/04/2015 |
Documents
| Name | Date |
|---|---|
| 3527-DELNP-2015-RELEVANT DOCUMENTS [29-09-2023(online)].pdf | 29/09/2023 |
| 3527-DELNP-2015-RELEVANT DOCUMENTS [26-09-2022(online)].pdf | 26/09/2022 |
| 3527-DELNP-2015-RELEVANT DOCUMENTS [23-09-2022(online)].pdf | 23/09/2022 |
| 3527-DELNP-2015-RELEVANT DOCUMENTS [12-07-2021(online)].pdf | 12/07/2021 |
| 3527-DELNP-2015-RELEVANT DOCUMENTS [30-01-2020(online)].pdf | 30/01/2020 |
| 3527-DELNP-2015-IntimationOfGrant24-10-2019.pdf | 24/10/2019 |
| 3527-DELNP-2015-PatentCertificate24-10-2019.pdf | 24/10/2019 |
| 3527-DELNP-2015-FORM 3 [15-05-2019(online)].pdf | 15/05/2019 |
| 3527-DELNP-2015-2. Marked Copy under Rule 14(2) (MANDATORY) [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-CLAIMS [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-COMPLETE SPECIFICATION [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-FER_SER_REPLY [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-OTHERS [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-Retyped Pages under Rule 14(1) (MANDATORY) [24-04-2019(online)].pdf | 24/04/2019 |
| 3527-DELNP-2015-FER.pdf | 29/10/2018 |
| 3527-DELNP-2015-FORM 3 [18-09-2017(online)].pdf | 18/09/2017 |
| Form 18 [07-10-2016(online)].pdf | 07/10/2016 |
| 3527-delnp-2015-Correspondence Others-(28-09-2015).pdf | 28/09/2015 |
| 3527-delnp-2015-Form-3-(28-09-2015).pdf | 28/09/2015 |
| 3527-delnp-2015-Correspodence Others-(03-08-2015).pdf | 03/08/2015 |
| 3527-delnp-2015-GPA-(03-08-2015).pdf | 03/08/2015 |
| 3527-delnp-2015-Correspondence Other-(24-07-2015).pdf | 24/07/2015 |
| 3527-delnp-2015-Form-1-(24-07-2015).pdf | 24/07/2015 |
| 3527-DELNP-2015.pdf | 21/05/2015 |
| DRAWINGS.pdf | 30/04/2015 |
| FORM 3.pdf | 30/04/2015 |
