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SINGLE SIDE ETCHER FOR ETCHING REAR SIDE OF A WAFER
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Abstract
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SINGLE SIDE ETCHER FOR ETCHING REAR SIDE OF A WAFER
ORDINARY APPLICATION
Published
Filed on 27 February 2021
Patent Information
| Application ID | 202131008363 |
| Date of Application | 27/02/2021 |
Documents
| Name | Date |
|---|---|
| 202131008363-CLAIMS [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-DRAWING [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-ENDORSEMENT BY INVENTORS [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-FER_SER_REPLY [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-FORM 3 [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-FORM-26 [23-06-2023(online)].pdf | 23/06/2023 |
| 202131008363-FER.pdf | 29/12/2022 |
| 202131008363-Proof of Right [12-07-2021(online)].pdf | 12/07/2021 |
| 202131008363-FORM 18 [13-03-2021(online)].pdf | 13/03/2021 |
| 202131008363-COMPLETE SPECIFICATION [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-DECLARATION OF INVENTORSHIP (FORM 5) [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-DRAWINGS [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-FIGURE OF ABSTRACT [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-FORM 1 [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-POWER OF AUTHORITY [27-02-2021(online)].pdf | 27/02/2021 |
| 202131008363-STATEMENT OF UNDERTAKING (FORM 3) [27-02-2021(online)].pdf | 27/02/2021 |
