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SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SILICON-CONTAINING THIN FILM PREPARATION METHOD USING SILICON PRECURSOR
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SILICON PRECURSOR COMPOUND AND PREPARATION METHOD THEREFOR, AND SILICON-CONTAINING THIN FILM PREPARATION METHOD USING SILICON PRECURSOR
PCT NATIONAL PHASE APPLICATION
Published
Filed on 21 November 2024
Abstract
The present invention relates to a novel silicon precursor compound enabling a silicon-containing thin film having excellent quality to be prepared, and a preparation method therefor, and a silicon-containing thin film preparation method using the silicon precursor compound.
Patent Information
| Application ID | 202447090528 |
| Invention Field | CHEMICAL |
| Date of Application | 21/11/2024 |
| Publication Number | 48/2024 |
Inventors
| Name | Address | Country | Nationality |
|---|---|---|---|
| YANG, Byeong-Il | 135, Gyejoksan-ro, Daedeok-gu, Daejeon 34402 | Republic of Korea | Republic of Korea |
| JEONG, Hee-Yeon | 88, Namsan-ro, Jecheon-si, Chungcheongbuk-do 27172 | Republic of Korea | Republic of Korea |
| SEONG, Yeong-Ju | 26-8, Yuseong-daero 1689beon-gil, Yuseong-gu, Daejeon 34046 | Republic of Korea | Republic of Korea |
| CHEON, Seong-Hak | 72, Chojung 4-gil, Jeungpyeong-eup, Jeungpyeong-gun, Chungcheongbuk-do 27938 | Republic of Korea | Republic of Korea |
| KIM, Joo-Yong | 23, Baemigol-gil, Siheung-si, Gyeonggi-do 14985 | Republic of Korea | Republic of Korea |
| BYUN, Young-Hun | 4, Samil-ro 6-gil, Jeungpyeong-eup, Jeungpyeong-gun, Chungcheongbuk-do 27945 | Republic of Korea | Republic of Korea |
Applicants
| Name | Address | Country | Nationality |
|---|---|---|---|
| MERCK PATENT GMBH | Frankfurter Strasse 250 64293 Darmstadt | Germany | Germany |
Documents
| Name | Date |
|---|---|
| 202447090528-FORM-26 [23-11-2024(online)].pdf | 23/11/2024 |
| 202447090528-COMPLETE SPECIFICATION [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-DECLARATION OF INVENTORSHIP (FORM 5) [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-DRAWINGS [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-FORM 1 [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-FORM 18 [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-PRIORITY DOCUMENTS [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-PROOF OF RIGHT [21-11-2024(online)].pdf | 21/11/2024 |
| 202447090528-REQUEST FOR EXAMINATION (FORM-18) [21-11-2024(online)].pdf | 21/11/2024 |
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