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ROBUST SYSTEM FOR PROXIMITY-EFFECT MITIGATION IN MICROELECTRONIC MANUFACTURING
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Abstract
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ROBUST SYSTEM FOR PROXIMITY-EFFECT MITIGATION IN MICROELECTRONIC MANUFACTURING
ORDINARY APPLICATION
Published
Filed on 5 June 2023
Patent Information
| Application ID | 202311038395 |
| Date of Application | 05/06/2023 |
Documents
| Name | Date |
|---|---|
| 202311038395-FORM 18 [09-07-2023(online)].pdf | 09/07/2023 |
| 202311038395-COMPLETE SPECIFICATION [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-DECLARATION OF INVENTORSHIP (FORM 5) [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-DRAWINGS [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-EDUCATIONAL INSTITUTION(S) [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-EVIDENCE FOR REGISTRATION UNDER SSI(FORM-28) [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-FORM 1 [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-FORM FOR SMALL ENTITY(FORM-28) [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-FORM-9 [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-OTHERS [05-06-2023(online)].pdf | 05/06/2023 |
| 202311038395-POWER OF AUTHORITY [05-06-2023(online)].pdf | 05/06/2023 |
