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"POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT METHOD, LOADING METHOD, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD"
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"POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT METHOD, LOADING METHOD, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD"
DIVISIONAL PCT NATIONAL PHASE APPLICATION
Published
Filed on 29 November 2013
Patent Information
| Application ID | 3501/KOLNP/2013 |
| Date of Application | 29/11/2013 |
Documents
| Name | Date |
|---|---|
| 3501-KOLNP-2013-AbandonedLetter.pdf | 01/01/2020 |
| 3501-KOLNP-2013-FER.pdf | 13/02/2019 |
| 3501-KOLNP-2013-(17-06-2015)-CORRESPONDENCE.pdf | 17/06/2015 |
| 3501-KOLNP-2013-(17-06-2015)-FORM-3.pdf | 17/06/2015 |
| 3501-KOLNP-2013-(16-02-2015)-CORRESPONDENCE.pdf | 16/02/2015 |
| 3501-KOLNP-2013-(16-02-2015)-FORM-3.pdf | 16/02/2015 |
| Petition under Rule 137 - 3501.KOLNP.2013.pdf | 16/12/2014 |
| 3501-KOLNP-2013-(15-12-2014)-CORRESPONDENCE.pdf | 15/12/2014 |
| 3501-KOLNP-2013-(15-12-2014)-FORM-1.pdf | 15/12/2014 |
| 3501-KOLNP-2013-(15-12-2014)-OTHERS.pdf | 15/12/2014 |
| 3501-KOLNP-2013-(21-10-2014)-CORRESPONDENCE.pdf | 21/10/2014 |
| 3501-KOLNP-2013-(21-10-2014)-FORM-3.pdf | 21/10/2014 |
| 3501-KOLNP-2013-(27-06-2014)-CORRESPONDENCE.pdf | 27/06/2014 |
| 3501-KOLNP-2013-(27-06-2014)-FORM-3.pdf | 27/06/2014 |
| 3501-KOLNP-2013-FORM-18.pdf | 29/04/2014 |
| 3501-KOLNP-2013-(26-02-2014)-CORRESPONDENCE.pdf | 26/02/2014 |
| 3501-KOLNP-2013-(26-02-2014)-FORM-3.pdf | 26/02/2014 |
| 3501-KOLNP-2013-(29-11-2013)-ABSTRACT.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-CLAIMS.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-CORRESPONDENCE.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-DESCRIPTION (COMPLETE).pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-DRAWINGS.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-FORM-1.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-FORM-2.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-FORM-3.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-FORM-5.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-GPA.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-OTHERS.pdf | 29/11/2013 |
| 3501-KOLNP-2013-(29-11-2013)-SPECIFICATION.pdf | 29/11/2013 |
