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POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
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POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
PCT NATIONAL PHASE APPLICATION
Published
Filed on 18 January 2023
Patent Information
| Application ID | 202347003579 |
| Date of Application | 18/01/2023 |
Documents
| Name | Date |
|---|---|
| 202347003579-FORM 3 [20-12-2023(online)].pdf | 20/12/2023 |
| 202347003579-Response to office action [26-06-2023(online)].pdf | 26/06/2023 |
| 202347003579-ABSTRACT [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-CLAIMS [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-COMPLETE SPECIFICATION [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-DRAWING [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-FER_SER_REPLY [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-FORM 13 [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-FORM 3 [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-Information under section 8(2) [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-OTHERS [23-05-2023(online)].pdf | 23/05/2023 |
| 202347003579-Correspondence_Power of Attorney, Assignment_16-03-2023.pdf | 16/03/2023 |
| 202347003579-FORM-26 [14-02-2023(online)].pdf | 14/02/2023 |
| 202347003579-FER.pdf | 31/01/2023 |
| 202347003579-FORM 3 [23-01-2023(online)].pdf | 23/01/2023 |
| 202347003579-COMPLETE SPECIFICATION [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-DECLARATION OF INVENTORSHIP (FORM 5) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-DRAWINGS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-FORM 1 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-FORM 18 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-PRIORITY DOCUMENTS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-PROOF OF RIGHT [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-REQUEST FOR EXAMINATION (FORM-18) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579-STATEMENT OF UNDERTAKING (FORM 3) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003579.pdf | 18/01/2023 |
