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PLASMA IN A SUBSTRATE PROCESSING APPARATUS
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Abstract
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PLASMA IN A SUBSTRATE PROCESSING APPARATUS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 23 December 2021
Patent Information
| Application ID | 202117060168 |
| Date of Application | 23/12/2021 |
Documents
| Name | Date |
|---|---|
| 202117060168-IntimationOfGrant26-12-2023.pdf | 26/12/2023 |
| 202117060168-PatentCertificate26-12-2023.pdf | 26/12/2023 |
| 202117060168-CLAIMS [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-DRAWING [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-FER_SER_REPLY [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-FORM 3 [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-FORM-26 [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-Information under section 8(2) [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-OTHERS [13-12-2022(online)].pdf | 13/12/2022 |
| 202117060168-FER.pdf | 20/06/2022 |
| 202117060168-Proof of Right [16-03-2022(online)].pdf | 16/03/2022 |
| 202117060168-FORM 3 [10-03-2022(online)].pdf | 10/03/2022 |
| 202117060168-FORM 18 [14-01-2022(online)].pdf | 14/01/2022 |
| 202117060168-COMPLETE SPECIFICATION [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-DECLARATION OF INVENTORSHIP (FORM 5) [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-DRAWINGS [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-FORM 1 [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-POWER OF AUTHORITY [23-12-2021(online)].pdf | 23/12/2021 |
| 202117060168-STATEMENT OF UNDERTAKING (FORM 3) [23-12-2021(online)].pdf | 23/12/2021 |
