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PEDESTAL SHROUD TO DIRECT FLOW OF PROCESS GASES AND BYPRODUCTS IN SUBSTRATE PROCESSING SYSTEMS
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Abstract
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PEDESTAL SHROUD TO DIRECT FLOW OF PROCESS GASES AND BYPRODUCTS IN SUBSTRATE PROCESSING SYSTEMS
ORDINARY APPLICATION
Published
Filed on 8 March 2022
Patent Information
| Application ID | 202211012613 |
| Date of Application | 08/03/2022 |
Documents
| Name | Date |
|---|---|
| 202211012613-Covering Letter [17-03-2023(online)].pdf | 17/03/2023 |
| 202211012613-REQUEST FOR CERTIFIED COPY [09-03-2023(online)].pdf | 09/03/2023 |
| 202211012613-Proof of Right [09-08-2022(online)].pdf | 09/08/2022 |
| 202211012613-FORM-26 [09-05-2022(online)].pdf | 09/05/2022 |
| 202211012613-COMPLETE SPECIFICATION [08-03-2022(online)].pdf | 08/03/2022 |
| 202211012613-DECLARATION OF INVENTORSHIP (FORM 5) [08-03-2022(online)].pdf | 08/03/2022 |
| 202211012613-DRAWINGS [08-03-2022(online)].pdf | 08/03/2022 |
| 202211012613-FORM 1 [08-03-2022(online)].pdf | 08/03/2022 |
| 202211012613-STATEMENT OF UNDERTAKING (FORM 3) [08-03-2022(online)].pdf | 08/03/2022 |
