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PATTERNED MEMS DEVICE FABRICATION FOR MULTIPLE SENSING APPLICATIONS
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Abstract
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PATTERNED MEMS DEVICE FABRICATION FOR MULTIPLE SENSING APPLICATIONS
ORDINARY APPLICATION
Published
Filed on 23 February 2021
Patent Information
| Application ID | 202141007596 |
| Date of Application | 23/02/2021 |
Documents
| Name | Date |
|---|---|
| 202141007596-ABSTRACT [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-CLAIMS [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-COMPLETE SPECIFICATION [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-CORRESPONDENCE [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-FER_SER_REPLY [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-FORM-26 [23-03-2023(online)].pdf | 23/03/2023 |
| 202141007596-FER.pdf | 27/09/2022 |
| 202141007596-Proof of Right [08-03-2021(online)].pdf | 08/03/2021 |
| 202141007596-COMPLETE SPECIFICATION [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-DECLARATION OF INVENTORSHIP (FORM 5) [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-DRAWINGS [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-FORM 1 [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-FORM 18 [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-POWER OF AUTHORITY [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-REQUEST FOR EXAMINATION (FORM-18) [23-02-2021(online)].pdf | 23/02/2021 |
| 202141007596-STATEMENT OF UNDERTAKING (FORM 3) [23-02-2021(online)].pdf | 23/02/2021 |
