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“OPTICAL PROXIMITY CORRECTION METHOD AND METHOD OF MANUFACTURING EXTREME ULTRAVIOLET MASK BY USING THE SAME”
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Abstract
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“OPTICAL PROXIMITY CORRECTION METHOD AND METHOD OF MANUFACTURING EXTREME ULTRAVIOLET MASK BY USING THE SAME”
CONVENTIONAL APPLICATION
Published
Filed on 28 June 2022
Information
| Application ID | 202244037088 |
| Date of Application | 28/06/2022 |
Documents
| Name | Date |
|---|---|
| 202244037088-COMPLETE SPECIFICATION [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-DECLARATION OF INVENTORSHIP (FORM 5) [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-DRAWINGS [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-FORM 1 [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-KR 10-2021-0084742-DASCODE-F29B [28-06-2022].pdf | 28/06/2022 |
| 202244037088-POWER OF AUTHORITY [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-PRIORITY DOCUMENTS [28-06-2022(online)].pdf | 28/06/2022 |
| 202244037088-PROOF OF RIGHT [28-06-2022(online)].pdf | 28/06/2022 |
