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NEGATIVE TONE RESIST COMPOSITIONS FOR LITHOGRAPHY
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Abstract
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NEGATIVE TONE RESIST COMPOSITIONS FOR LITHOGRAPHY
ORDINARY APPLICATION
Published
Filed on 8 November 2021
Patent Information
| Application ID | 202111050981 |
| Date of Application | 08/11/2021 |
Documents
| Name | Date |
|---|---|
| 202111050981-IntimationOfGrant18-10-2023.pdf | 18/10/2023 |
| 202111050981-PatentCertificate18-10-2023.pdf | 18/10/2023 |
| 202111050981-AMMENDED DOCUMENTS [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-CLAIMS [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-COMPLETE SPECIFICATION [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-FER_SER_REPLY [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-FORM 13 [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-MARKED COPIES OF AMENDEMENTS [15-09-2023(online)].pdf | 15/09/2023 |
| 202111050981-FER.pdf | 20/03/2023 |
| 202111050981-FORM 18 [30-11-2022(online)].pdf | 30/11/2022 |
| 202111050981-FORM-9 [23-03-2022(online)].pdf | 23/03/2022 |
| 202111050981-FORM-26 [24-11-2021(online)].pdf | 24/11/2021 |
| 202111050981-COMPLETE SPECIFICATION [08-11-2021(online)].pdf | 08/11/2021 |
| 202111050981-DECLARATION OF INVENTORSHIP (FORM 5) [08-11-2021(online)].pdf | 08/11/2021 |
| 202111050981-DRAWINGS [08-11-2021(online)].pdf | 08/11/2021 |
| 202111050981-FORM 1 [08-11-2021(online)].pdf | 08/11/2021 |
| 202111050981-STATEMENT OF UNDERTAKING (FORM 3) [08-11-2021(online)].pdf | 08/11/2021 |
