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MONITOR CHEMICAL MECHANICAL POLISHING PROCESS USING MACHINE LEARNING BASED PROCESSING OF HEAT IMAGES
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MONITOR CHEMICAL MECHANICAL POLISHING PROCESS USING MACHINE LEARNING BASED PROCESSING OF HEAT IMAGES
PCT NATIONAL PHASE APPLICATION
Published
Filed on 18 January 2023
Patent Information
| Application ID | 202347003576 |
| Date of Application | 18/01/2023 |
Documents
| Name | Date |
|---|---|
| 202347003576-FORM 3 [27-12-2023(online)].pdf | 27/12/2023 |
| 202347003576-FORM 3 [24-07-2023(online)].pdf | 24/07/2023 |
| 202347003576-Correspondence_Power of Attorney, Assignment_16-03-2023.pdf | 16/03/2023 |
| 202347003576-FORM-26 [14-02-2023(online)].pdf | 14/02/2023 |
| 202347003576-FORM 3 [23-01-2023(online)].pdf | 23/01/2023 |
| 202347003576-COMPLETE SPECIFICATION [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-DECLARATION OF INVENTORSHIP (FORM 5) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-DRAWINGS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-FORM 1 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-FORM 18 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-PRIORITY DOCUMENTS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-PROOF OF RIGHT [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-REQUEST FOR EXAMINATION (FORM-18) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003576-STATEMENT OF UNDERTAKING (FORM 3) [18-01-2023(online)].pdf | 18/01/2023 |
