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MODULAR NANO AND MICRO PHOTOLITHOGRAPHY INSTRUMENT
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Abstract
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MODULAR NANO AND MICRO PHOTOLITHOGRAPHY INSTRUMENT
ORDINARY APPLICATION
Published
Filed on 9 March 2021
Patent Information
| Application ID | 202131009815 |
| Date of Application | 09/03/2021 |
Documents
| Name | Date |
|---|---|
| 202131009815-IntimationOfGrant18-03-2022.pdf | 18/03/2022 |
| 202131009815-PatentCertificate18-03-2022.pdf | 18/03/2022 |
| 202131009815-Annexure [12-03-2022(online)].pdf | 12/03/2022 |
| 202131009815-Written submissions and relevant documents [12-03-2022(online)].pdf | 12/03/2022 |
| 202131009815-US(14)-HearingNotice-(HearingDate-02-03-2022).pdf | 27/01/2022 |
| 202131009815-FORM-26 [07-12-2021(online)].pdf | 07/12/2021 |
| 202131009815-FORM 13 [06-12-2021(online)].pdf | 06/12/2021 |
| 202131009815-POA [06-12-2021(online)].pdf | 06/12/2021 |
| 202131009815-ABSTRACT [05-12-2021(online)].pdf | 05/12/2021 |
| 202131009815-CLAIMS [05-12-2021(online)].pdf | 05/12/2021 |
| 202131009815-FER_SER_REPLY [05-12-2021(online)].pdf | 05/12/2021 |
| 202131009815-OTHERS [05-12-2021(online)].pdf | 05/12/2021 |
| 202131009815-FER.pdf | 18/10/2021 |
| 202131009815-Proof of Right [01-06-2021(online)].pdf | 01/06/2021 |
| 202131009815-FORM 18A [10-03-2021(online)].pdf | 10/03/2021 |
| 202131009815-FORM28 [10-03-2021(online)].pdf | 10/03/2021 |
| 202131009815-STARTUP [10-03-2021(online)].pdf | 10/03/2021 |
| 202131009815-COMPLETE SPECIFICATION [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-DECLARATION OF INVENTORSHIP (FORM 5) [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-DRAWINGS [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-EVIDENCE FOR REGISTRATION UNDER SSI(FORM-28) [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-FORM 1 [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-FORM FOR SMALL ENTITY(FORM-28) [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-FORM FOR STARTUP [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-FORM-9 [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-OTHERS [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-POWER OF AUTHORITY [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-REQUEST FOR EARLY PUBLICATION(FORM-9) [09-03-2021(online)].pdf | 09/03/2021 |
| 202131009815-STATEMENT OF UNDERTAKING (FORM 3) [09-03-2021(online)].pdf | 09/03/2021 |
