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METHODS FOR PROCESSING SILICON CARBIDE WAFERS WITH RELAXED POSITIVE BOW
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Abstract
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METHODS FOR PROCESSING SILICON CARBIDE WAFERS WITH RELAXED POSITIVE BOW
PCT NATIONAL PHASE APPLICATION
Published
Filed on 1 December 2021
Patent Information
| Application ID | 202117055610 |
| Date of Application | 01/12/2021 |
Documents
| Name | Date |
|---|---|
| 202117055610-FORM 3 [10-12-2023(online)].pdf | 10/12/2023 |
| 202117055610-FORM 3 [20-07-2023(online)].pdf | 20/07/2023 |
| 202117055610-CLAIMS [09-11-2022(online)].pdf | 09/11/2022 |
| 202117055610-DRAWING [09-11-2022(online)].pdf | 09/11/2022 |
| 202117055610-FER_SER_REPLY [09-11-2022(online)].pdf | 09/11/2022 |
| 202117055610-FER.pdf | 09/06/2022 |
| 202117055610-Proof of Right [01-06-2022(online)].pdf | 01/06/2022 |
| 202117055610-FORM 3 [03-05-2022(online)].pdf | 03/05/2022 |
| 202117055610-FORM-26 [10-02-2022(online)].pdf | 10/02/2022 |
| 202117055610-COMPLETE SPECIFICATION [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-DECLARATION OF INVENTORSHIP (FORM 5) [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-DRAWINGS [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-FORM 1 [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-FORM 18 [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-PRIORITY DOCUMENTS [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-REQUEST FOR EXAMINATION (FORM-18) [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-STATEMENT OF UNDERTAKING (FORM 3) [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [01-12-2021(online)].pdf | 01/12/2021 |
| 202117055610.pdf | 01/12/2021 |
