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METHOD TO REALIZE HIGHLY A-AXIS ORIENTED ALUMINIUM NITRIDE (ALN) THIN FILMS ON MO COATED SI SUBSTRATE BY REACTIVE RF MAGNETRON SPUTTERING
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METHOD TO REALIZE HIGHLY A-AXIS ORIENTED ALUMINIUM NITRIDE (ALN) THIN FILMS ON MO COATED SI SUBSTRATE BY REACTIVE RF MAGNETRON SPUTTERING
ORDINARY APPLICATION
Published
Filed on 24 July 2020
Patent Information
| Application ID | 202041031742 |
| Date of Application | 24/07/2020 |
Documents
| Name | Date |
|---|---|
| 202041031742-EDUCATIONAL INSTITUTION(S) [14-06-2023(online)].pdf | 14/06/2023 |
| 202041031742-IntimationOfGrant16-03-2023.pdf | 16/03/2023 |
| 202041031742-PatentCertificate16-03-2023.pdf | 16/03/2023 |
| 202041031742-CLAIMS [10-03-2023(online)].pdf | 10/03/2023 |
| 202041031742-DRAWING [10-03-2023(online)].pdf | 10/03/2023 |
| 202041031742-FER_SER_REPLY [10-03-2023(online)].pdf | 10/03/2023 |
| 202041031742-FER.pdf | 13/09/2022 |
| 202041031742-AMENDED DOCUMENTS [24-06-2022(online)].pdf | 24/06/2022 |
| 202041031742-EDUCATIONAL INSTITUTION(S) [24-06-2022(online)].pdf | 24/06/2022 |
| 202041031742-EVIDENCE FOR REGISTRATION UNDER SSI [24-06-2022(online)].pdf | 24/06/2022 |
| 202041031742-FORM 13 [24-06-2022(online)].pdf | 24/06/2022 |
| 202041031742-POA [24-06-2022(online)].pdf | 24/06/2022 |
| 202041031742-FORM-8 [13-04-2021(online)].pdf | 13/04/2021 |
| 202041031742-FORM 18 [23-03-2021(online)].pdf | 23/03/2021 |
| 202041031742-COMPLETE SPECIFICATION [24-07-2020(online)].pdf | 24/07/2020 |
| 202041031742-DECLARATION OF INVENTORSHIP (FORM 5) [24-07-2020(online)].pdf | 24/07/2020 |
| 202041031742-DRAWINGS [24-07-2020(online)].pdf | 24/07/2020 |
| 202041031742-FORM 1 [24-07-2020(online)].pdf | 24/07/2020 |
| 202041031742-POWER OF AUTHORITY [24-07-2020(online)].pdf | 24/07/2020 |
| 202041031742-STATEMENT OF UNDERTAKING (FORM 3) [24-07-2020(online)].pdf | 24/07/2020 |
