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METHOD AND SYSTEM FOR THROUGHPUT DETERMINATION OF A SEMICONDUCTOR CLUSTER TOOL
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METHOD AND SYSTEM FOR THROUGHPUT DETERMINATION OF A SEMICONDUCTOR CLUSTER TOOL
ORDINARY APPLICATION
Published
Filed on 31 July 2015
Patent Information
| Application ID | 3980/CHE/2015 |
| Date of Application | 31/07/2015 |
Documents
| Name | Date |
|---|---|
| 3980-CHE-2015-IntimationOfGrant23-08-2022.pdf | 23/08/2022 |
| 3980-CHE-2015-PatentCertificate23-08-2022.pdf | 23/08/2022 |
| 3980-CHE-2015-AMMENDED DOCUMENTS [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-Annexure [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-FORM 13 [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-MARKED COPIES OF AMENDEMENTS [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-PETITION UNDER RULE 137 [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-POA [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-RELEVANT DOCUMENTS [14-04-2022(online)]-1.pdf | 14/04/2022 |
| 3980-CHE-2015-RELEVANT DOCUMENTS [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-Written submissions and relevant documents [14-04-2022(online)].pdf | 14/04/2022 |
| 3980-CHE-2015-Annexure [10-03-2022(online)].pdf | 10/03/2022 |
| 3980-CHE-2015-Correspondence to notify the Controller [10-03-2022(online)].pdf | 10/03/2022 |
| 3980-CHE-2015-FORM-26 [10-03-2022(online)].pdf | 10/03/2022 |
| 3980-CHE-2015-US(14)-HearingNotice-(HearingDate-01-04-2022).pdf | 01/03/2022 |
| 3980-CHE-2015-CLAIMS [13-12-2018(online)].pdf | 13/12/2018 |
| 3980-CHE-2015-CORRESPONDENCE [13-12-2018(online)].pdf | 13/12/2018 |
| 3980-CHE-2015-FER_SER_REPLY [13-12-2018(online)].pdf | 13/12/2018 |
| 3980-CHE-2015-OTHERS [13-12-2018(online)].pdf | 13/12/2018 |
| 3980-CHE-2015-FER.pdf | 18/09/2018 |
| 3980-CHE-2015-FORM-26 [16-03-2018(online)].pdf | 16/03/2018 |
| 3980-CHE-2015-FORM-26 [15-03-2018(online)].pdf | 15/03/2018 |
| abstract 3980-CHE-2015.jpg | 01/10/2015 |
| Description(Complete) [31-07-2015(online)].pdf | 31/07/2015 |
| Drawing [31-07-2015(online)].pdf | 31/07/2015 |
| Form 18 [31-07-2015(online)].pdf | 31/07/2015 |
| Form 3 [31-07-2015(online)].pdf | 31/07/2015 |
| Form 5 [31-07-2015(online)].pdf | 31/07/2015 |
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