METHOD AND MEASURING DEVICE FOR MEASURING A TEST OBJECT BY MEANS OF X-RAY FLUORESCENCE

Abstract

The invention relates to a method for measuring a test object (27) using a measuring device (11) by means of x-ray fluorescence, more particularly for measuring the thickness of thin layers on the test object (27) or for determining an element concentration in the test object (27), wherein: before a measuring task is carried out for the test object (27) positioned in the measuring device (11), a structure of the measuring point (25) on the test object (27) is captured; starting from a distance Ds, which determines a position of the focal plane above the measuring table (21), a focal plane of a controllable focusing optical unit (42) is moved towards the measuring point (45) on the test object (27); an apex of the measuring point on the test object (27) is captured by an image of the image capture apparatus (33) and a distance D1 to the measuring table (21) is assigned; starting from the distance D1, the focusing optical unit (42) is controlled in a plurality of steps and the focal plane of the beam path (41) of the image capture apparatus (33) is moved by the focusing optical unit (42) in the direction of the measuring table (21) and an image of the measuring point (45) on the test object (27) is captured from every step of the shifted focal plane and a distance D2... Dn is assigned; all images captured by the image capture apparatus (33) are transferred by the evaluation apparatus (32) into a summed image and are output in a display (39) that is connected to the measuring device (12).

Documents