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METHOD FOR VACUUM PACKAGING OF MEMS SENSORS USING PORE FILLED GETTER
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Abstract
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METHOD FOR VACUUM PACKAGING OF MEMS SENSORS USING PORE FILLED GETTER
ORDINARY APPLICATION
Published
Filed on 6 December 2021
Patent Information
| Application ID | 202111056567 |
| Date of Application | 06/12/2021 |
Documents
| Name | Date |
|---|---|
| 202111056567-FORM 18 [08-12-2022(online)].pdf | 08/12/2022 |
| 202111056567-COMPLETE SPECIFICATION [06-12-2022(online)].pdf | 06/12/2022 |
| 202111056567-CORRESPONDENCE-OTHERS [06-12-2022(online)].pdf | 06/12/2022 |
| 202111056567-DRAWING [06-12-2022(online)].pdf | 06/12/2022 |
| 202111056567-ENDORSEMENT BY INVENTORS [06-12-2022(online)].pdf | 06/12/2022 |
| 202111056567-Proof of Right [16-05-2022(online)].pdf | 16/05/2022 |
| 202111056567-DECLARATION OF INVENTORSHIP (FORM 5) [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-DRAWINGS [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-EDUCATIONAL INSTITUTION(S) [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-EVIDENCE FOR REGISTRATION UNDER SSI [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-EVIDENCE FOR REGISTRATION UNDER SSI(FORM-28) [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-FORM 1 [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-FORM FOR SMALL ENTITY(FORM-28) [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-POWER OF AUTHORITY [06-12-2021(online)].pdf | 06/12/2021 |
| 202111056567-PROVISIONAL SPECIFICATION [06-12-2021(online)].pdf | 06/12/2021 |
