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METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER
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Abstract
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METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER
PCT NATIONAL PHASE APPLICATION
Published
Filed on 21 March 2014
Patent Information
| Application ID | 2165/DELNP/2014 |
| Date of Application | 21/03/2014 |
Documents
| Name | Date |
|---|---|
| 2165-DELNP-2014-WithDrawalLetter.pdf | 21/11/2017 |
| Other Document [26-12-2016(online)].pdf | 26/12/2016 |
| Other Patent Document [26-12-2016(online)].pdf | 26/12/2016 |
| 2165-delnp-2014-Correspondence-Others-(28-08-2014).pdf | 28/08/2014 |
| 2165-delnp-2014-Form-3-(28-08-2014).pdf | 28/08/2014 |
| 2165-delnp-2014-Correspondence-Others-(04-06-2014).pdf | 04/06/2014 |
| 2165-delnp-2014-Form-3-(04-06-2014).pdf | 04/06/2014 |
| Application related documents.pdf | 02/04/2014 |
| Complete specification.pdf | 02/04/2014 |
| drawings.pdf | 02/04/2014 |
| FORM 3.pdf | 02/04/2014 |
| Form 5.pdf | 02/04/2014 |
| GPA.pdf | 02/04/2014 |
| PCT-304.pdf | 02/04/2014 |
