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METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEVICES OPTICAL DEVICES MICROMACHINES AND MECHANICAL PRECISION DEVICES HAVING PATTERNED MATERIAL LAYERS WITH LINE SPACE DIMENSIONS OF 50 NM AND LESS
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METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEVICES OPTICAL DEVICES MICROMACHINES AND MECHANICAL PRECISION DEVICES HAVING PATTERNED MATERIAL LAYERS WITH LINE SPACE DIMENSIONS OF 50 NM AND LESS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 26 August 2013
Patent Information
| Application ID | 6880/CHENP/2013 |
| Date of Application | 26/08/2013 |
Documents
| Name | Date |
|---|---|
| 6880-CHENP-2013-US(14)-ExtendedHearingNotice-(HearingDate-03-11-2022).pdf | 12/10/2022 |
| 6880-CHENP-2013-Correspondence to notify the Controller [23-09-2022(online)].pdf | 23/09/2022 |
| 6880-CHENP-2013-US(14)-HearingNotice-(HearingDate-28-09-2022).pdf | 07/09/2022 |
| 6880-CHENP-2013-CLAIMS [09-10-2018(online)].pdf | 09/10/2018 |
| 6880-CHENP-2013-COMPLETE SPECIFICATION [09-10-2018(online)].pdf | 09/10/2018 |
| 6880-CHENP-2013-CORRESPONDENCE [09-10-2018(online)].pdf | 09/10/2018 |
| 6880-CHENP-2013-FER_SER_REPLY [09-10-2018(online)].pdf | 09/10/2018 |
| 6880-CHENP-2013-OTHERS [09-10-2018(online)].pdf | 09/10/2018 |
| 6880-CHENP-2013-FORM 3 [01-10-2018(online)].pdf | 01/10/2018 |
| 6880-CHENP-2013-FORM 3 [08-05-2018(online)].pdf | 08/05/2018 |
| 6880-CHENP-2013-FER.pdf | 11/04/2018 |
| 6880-CHENP-2013-FORM 3 [08-11-2017(online)].pdf | 08/11/2017 |
| Form 3 [14-04-2017(online)].pdf | 14/04/2017 |
| Form 3 [07-11-2016(online)].pdf | 07/11/2016 |
| Form 3 [13-06-2016(online)].pdf | 13/06/2016 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 10-08-2015.pdf | 10/08/2015 |
| 6880-CHENP-2013 FORM-3 10-08-2015.pdf | 10/08/2015 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 09-04-2015.pdf | 09/04/2015 |
| 6880-CHENP-2013 FORM-3 09-04-2015.pdf | 09/04/2015 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 01-12-2014.pdf | 01/12/2014 |
| 6880-CHENP-2013 FORM-3 01-12-2014.pdf | 01/12/2014 |
| abstract6880-CHENP-2013.jpg | 21/08/2014 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 25-06-2014.pdf | 25/06/2014 |
| 6880-CHENP-2013 FORM-3 25-06-2014.pdf | 25/06/2014 |
| 6880 A-CHENP-2013 FORM-1 6-12-2013.pdf | 08/01/2014 |
| 6880 A-CHENP-2013 FORM-13 6-12-2013.pdf | 08/01/2014 |
| 6880 A-CHENP-2013 FORM-5 6-12-2013.pdf | 08/01/2014 |
| 6880 A-CHENP-2013 CORRESPONDENCE OTHERS 6-12-2013.pdf | 08/01/2014 |
| 6880-CHENP-2013 FORM-1 6-12-2013.pdf | 07/01/2014 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 6-12-2013.pdf | 07/01/2014 |
| 6880-CHENP-2013 CORRESPONDENCE OTHERS 23-10-2013.pdf | 23/10/2013 |
| 6880-CHENP-2013 FORM-3 23-10-2013.pdf | 23/10/2013 |
| FORM 3.pdf | 03/09/2013 |
| FORM 5.pdf | 03/09/2013 |
| GPOA.pdf | 03/09/2013 |
| SPECIFICATION.pdf | 03/09/2013 |
| 6880-CHENP-2013.pdf | 28/08/2013 |
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