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METHOD AND APPARATUS FOR PATTERNING 3D NANO-MICROSTRUCTURES OF SUB-WAVELENGTH RESOLUTION WITH TWO PHOTON LITHOGRAPHY
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Abstract
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METHOD AND APPARATUS FOR PATTERNING 3D NANO-MICROSTRUCTURES OF SUB-WAVELENGTH RESOLUTION WITH TWO PHOTON LITHOGRAPHY
ORDINARY APPLICATION
Published
Filed on 3 March 2022
Patent Information
| Application ID | 202221011509 |
| Date of Application | 03/03/2022 |
Documents
| Name | Date |
|---|---|
| 202221011509-IntimationOfGrant19-05-2023.pdf | 19/05/2023 |
| 202221011509-PatentCertificate19-05-2023.pdf | 19/05/2023 |
| 202221011509-CLAIMS [29-11-2022(online)].pdf | 29/11/2022 |
| 202221011509-FER_SER_REPLY [29-11-2022(online)].pdf | 29/11/2022 |
| 202221011509-OTHERS [29-11-2022(online)].pdf | 29/11/2022 |
| 202221011509-Response to office action [29-11-2022(online)].pdf | 29/11/2022 |
| 202221011509-FER.pdf | 31/05/2022 |
| 202221011509-Proof of Right [25-05-2022(online)].pdf | 25/05/2022 |
| Abstract1.jpg | 14/03/2022 |
| 202221011509-COMPLETE SPECIFICATION [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-DECLARATION OF INVENTORSHIP (FORM 5) [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-DRAWINGS [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-EDUCATIONAL INSTITUTION(S) [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-EVIDENCE FOR REGISTRATION UNDER SSI [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-EVIDENCE OF ELIGIBILTY RULE 24C1h [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-FORM 1 [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-FORM 18A [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-FORM-8 [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-FORM-9 [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-POWER OF AUTHORITY [03-03-2022(online)].pdf | 03/03/2022 |
| 202221011509-STATEMENT OF UNDERTAKING (FORM 3) [03-03-2022(online)].pdf | 03/03/2022 |
