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METAL - ORGANIC CLUSTERS (MOCS) RESIST FORMULATION COMPATIBLE TO NEXT GENERATION LITHOGRAPHY APPLICATIONS FOR HIGH VOLUME ELECTRONICS CHIP MANUFACTURING
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Abstract
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METAL - ORGANIC CLUSTERS (MOCS) RESIST FORMULATION COMPATIBLE TO NEXT GENERATION LITHOGRAPHY APPLICATIONS FOR HIGH VOLUME ELECTRONICS CHIP MANUFACTURING
ORDINARY APPLICATION
Published
Filed on 15 May 2023
Patent Information
| Application ID | 202311033883 |
| Date of Application | 15/05/2023 |
Documents
| Name | Date |
|---|---|
| 202311033883-PETITION UNDER RULE 137 [04-09-2023(online)].pdf | 04/09/2023 |
| 202311033883-RELEVANT DOCUMENTS [04-09-2023(online)].pdf | 04/09/2023 |
| 202311033883-FORM-26 [01-09-2023(online)].pdf | 01/09/2023 |
| 202311033883-FER.pdf | 11/08/2023 |
| 202311033883-EVIDENCE OF ELIGIBILTY RULE 24C1f [26-06-2023(online)].pdf | 26/06/2023 |
| 202311033883-FORM 18A [26-06-2023(online)].pdf | 26/06/2023 |
| 202311033883-FORM-9 [01-06-2023(online)].pdf | 01/06/2023 |
| 202311033883-EDUCATIONAL INSTITUTION(S) [16-05-2023(online)].pdf | 16/05/2023 |
| 202311033883-EVIDENCE FOR REGISTRATION UNDER SSI [16-05-2023(online)].pdf | 16/05/2023 |
| 202311033883-COMPLETE SPECIFICATION [15-05-2023(online)].pdf | 15/05/2023 |
| 202311033883-DECLARATION OF INVENTORSHIP (FORM 5) [15-05-2023(online)].pdf | 15/05/2023 |
| 202311033883-DRAWINGS [15-05-2023(online)].pdf | 15/05/2023 |
| 202311033883-FORM 1 [15-05-2023(online)].pdf | 15/05/2023 |
| 202311033883-PROOF OF RIGHT [15-05-2023(online)].pdf | 15/05/2023 |
