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MATERIALS, COMPONENT, AND METHODS FOR USE WITH EXTREME ULTRAVIOLET RADIATION IN LITHOGRAPHY AND OTHER APPLICATIONS
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Abstract
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MATERIALS, COMPONENT, AND METHODS FOR USE WITH EXTREME ULTRAVIOLET RADIATION IN LITHOGRAPHY AND OTHER APPLICATIONS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 5 March 2020
Patent Information
| Application ID | 202017009569 |
| Date of Application | 05/03/2020 |
Documents
| Name | Date |
|---|---|
| 202017009569-IntimationOfGrant03-01-2024.pdf | 03/01/2024 |
| 202017009569-PatentCertificate03-01-2024.pdf | 03/01/2024 |
| 202017009569-Correspondence-230922.pdf | 30/09/2022 |
| 202017009569-GPA-230922.pdf | 30/09/2022 |
| 202017009569-FORM 3 [23-09-2022(online)].pdf | 23/09/2022 |
| 202017009569-Information under section 8(2) [23-09-2022(online)].pdf | 23/09/2022 |
| 202017009569-ABSTRACT [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-CLAIMS [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-CORRESPONDENCE [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-FER_SER_REPLY [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-OTHERS [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-PETITION UNDER RULE 137 [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-RELEVANT DOCUMENTS [21-09-2022(online)].pdf | 21/09/2022 |
| 202017009569-FORM 4(ii) [22-08-2022(online)].pdf | 22/08/2022 |
| 202017009569-FER.pdf | 24/02/2022 |
| 202017009569.pdf | 19/10/2021 |
| abstract.jpg | 19/10/2021 |
| 202017009569-FORM 18 [05-08-2021(online)].pdf | 05/08/2021 |
| 202017009569-FORM-26 [29-06-2021(online)].pdf | 29/06/2021 |
| 202017009569-PETITION UNDER RULE 137 [29-06-2021(online)].pdf | 29/06/2021 |
| 202017009569-RELEVANT DOCUMENTS [29-06-2021(online)].pdf | 29/06/2021 |
| 202017009569-FORM 3 [12-02-2021(online)].pdf | 12/02/2021 |
| 202017009569-PETITION UNDER RULE 137 [12-02-2021(online)].pdf | 12/02/2021 |
| 202017009569-RELEVANT DOCUMENTS [12-02-2021(online)].pdf | 12/02/2021 |
| 202017009569-COMPLETE SPECIFICATION [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-DECLARATION OF INVENTORSHIP (FORM 5) [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-DRAWINGS [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-FIGURE OF ABSTRACT [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-FORM 1 [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105) [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-PRIORITY DOCUMENTS [05-03-2020(online)].pdf | 05/03/2020 |
| 202017009569-STATEMENT OF UNDERTAKING (FORM 3) [05-03-2020(online)].pdf | 05/03/2020 |
