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LARGE AREA MICROWAVE PLASMA CVD APPARATUS AND CORRESPONDING METHOD FOR PROVIDING SUCH DEPOSITION
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LARGE AREA MICROWAVE PLASMA CVD APPARATUS AND CORRESPONDING METHOD FOR PROVIDING SUCH DEPOSITION
PCT NATIONAL PHASE APPLICATION
Published
Filed on 14 November 2020
Patent Information
| Application ID | 202047049804 |
| Date of Application | 14/11/2020 |
Documents
| Name | Date |
|---|---|
| 202047049804-IntimationOfGrant26-12-2023.pdf | 26/12/2023 |
| 202047049804-PatentCertificate26-12-2023.pdf | 26/12/2023 |
| 202047049804-abstract.jpg | 18/10/2021 |
| 202047049804-FER.pdf | 18/10/2021 |
| 202047049804.pdf | 18/10/2021 |
| 202047049804-CLAIMS [17-09-2021(online)].pdf | 17/09/2021 |
| 202047049804-COMPLETE SPECIFICATION [17-09-2021(online)].pdf | 17/09/2021 |
| 202047049804-DRAWING [17-09-2021(online)].pdf | 17/09/2021 |
| 202047049804-FER_SER_REPLY [17-09-2021(online)].pdf | 17/09/2021 |
| 202047049804-OTHERS [17-09-2021(online)].pdf | 17/09/2021 |
| 202047049804-COMPLETE SPECIFICATION [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-DECLARATION OF INVENTORSHIP (FORM 5) [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-DRAWINGS [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-FORM 1 [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-FORM 18 [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-POWER OF AUTHORITY [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-PRIORITY DOCUMENTS [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-PROOF OF RIGHT [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-REQUEST FOR EXAMINATION (FORM-18) [14-11-2020(online)].pdf | 14/11/2020 |
| 202047049804-STATEMENT OF UNDERTAKING (FORM 3) [14-11-2020(online)].pdf | 14/11/2020 |
