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ION BOMBARDMENT DEVICE AND SUBSTRATE SURFACE CLEANING METHOD USING SAME

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ION BOMBARDMENT DEVICE AND SUBSTRATE SURFACE CLEANING METHOD USING SAME

PCT NATIONAL PHASE APPLICATION

Published

date

Filed on 3 August 2015

Patent Information

Application ID4697/CHENP/2015
Date of Application03/08/2015

Documents

NameDate
4697-CHENP-2015-RELEVANT DOCUMENTS [28-07-2023(online)].pdf28/07/2023
4697-CHENP-2015-IntimationOfGrant04-03-2022.pdf04/03/2022
4697-CHENP-2015-PatentCertificate04-03-2022.pdf04/03/2022
4697-CHENP-2015-Response to office action [23-02-2022(online)].pdf23/02/2022
4697-CHENP-2015-ABSTRACT [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-CLAIMS [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-COMPLETE SPECIFICATION [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-DRAWING [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-FER_SER_REPLY [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-FORM 3 [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-OTHERS [01-11-2019(online)].pdf01/11/2019
4697-CHENP-2015-Verified English translation (MANDATORY) [17-07-2019(online)].pdf17/07/2019
4697-CHENP-2015-FER.pdf16/05/2019
4697-CHENP-2015-FORM 3 [07-09-2017(online)].pdf07/09/2017
Form 13 [01-09-2016(online)].pdf01/09/2016
Other Document [01-09-2016(online)].pdf01/09/2016
Other Patent Document [01-09-2016(online)].pdf01/09/2016
4697-CHENP-2015 CORRESPONDENCE-F-3 02-02-2016.pdf02/02/2016
4697-CHENP-2015 FORM-3 02-02-2016.pdf02/02/2016
4697-CHENP-2015 ASSIGNMENT 10-08-2015.pdf10/08/2015
4697-CHENP-2015 CORRESPONDENCE OTHERS 10-08-2015.pdf10/08/2015
4697-CHENP-2015.pdf08/08/2015
Description(Complete) [03-08-2015(online)].pdf03/08/2015
Drawing [03-08-2015(online)].pdf03/08/2015
Form 1 [03-08-2015(online)].pdf03/08/2015
Form 18 [03-08-2015(online)].pdf03/08/2015
Form 3 [03-08-2015(online)].pdf03/08/2015
Form 5 [03-08-2015(online)].pdf03/08/2015
Power of Attorney [03-08-2015(online)].pdf03/08/2015
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