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Integrated optical MEMS serially coupled double racetrack resonator based accelerometer and high Q-factor photonic crystal microring-resonator based pressure sensor.
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Abstract
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Integrated optical MEMS serially coupled double racetrack resonator based accelerometer and high Q-factor photonic crystal microring-resonator based pressure sensor.
ORDINARY APPLICATION
Published
Filed on 7 September 2021
Patent Information
| Application ID | 202141040452 |
| Date of Application | 07/09/2021 |
Documents
| Name | Date |
|---|---|
| 202141040452-IntimationOfGrant09-06-2023.pdf | 09/06/2023 |
| 202141040452-PatentCertificate09-06-2023.pdf | 09/06/2023 |
| 202141040452-Annexure [27-03-2023(online)].pdf | 27/03/2023 |
| 202141040452-Written submissions and relevant documents [27-03-2023(online)].pdf | 27/03/2023 |
| 202141040452-Correspondence to notify the Controller [21-03-2023(online)].pdf | 21/03/2023 |
| 202141040452-US(14)-HearingNotice-(HearingDate-21-03-2023).pdf | 22/02/2023 |
| 202141040452-ABSTRACT [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-CLAIMS [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-COMPLETE SPECIFICATION [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-DRAWING [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-FER_SER_REPLY [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-FORM-26 [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-OTHERS [01-02-2023(online)].pdf | 01/02/2023 |
| 202141040452-FER.pdf | 02/08/2022 |
| 202141040452-FORM 18A [03-10-2021(online)].pdf | 03/10/2021 |
| 202141040452-FORM-9 [20-09-2021(online)].pdf | 20/09/2021 |
| 202141040452-COMPLETE SPECIFICATION [07-09-2021(online)].pdf | 07/09/2021 |
| 202141040452-DRAWINGS [07-09-2021(online)].pdf | 07/09/2021 |
| 202141040452-FORM 1 [07-09-2021(online)].pdf | 07/09/2021 |
