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GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN CHEMICAL MECHANICAL POLISHING
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Abstract
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GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN CHEMICAL MECHANICAL POLISHING
PCT NATIONAL PHASE APPLICATION
Published
Filed on 18 January 2023
Patent Information
| Application ID | 202347003557 |
| Date of Application | 18/01/2023 |
Documents
| Name | Date |
|---|---|
| 202347003557-FORM 3 [16-10-2023(online)].pdf | 16/10/2023 |
| 202347003557-FORM 4(ii) [09-10-2023(online)].pdf | 09/10/2023 |
| 202347003557-FORM 3 [16-05-2023(online)].pdf | 16/05/2023 |
| 202347003557-FER.pdf | 18/04/2023 |
| 202347003557-Correspondence_Assignment. Power of Attorney_02-03-2023.pdf | 02/03/2023 |
| 202347003557-FORM-26 [06-02-2023(online)].pdf | 06/02/2023 |
| 202347003557-FORM 3 [20-01-2023(online)].pdf | 20/01/2023 |
| 202347003557-COMPLETE SPECIFICATION [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-DECLARATION OF INVENTORSHIP (FORM 5) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-DRAWINGS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-FORM 1 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-FORM 18 [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-PRIORITY DOCUMENTS [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-PROOF OF RIGHT [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-REQUEST FOR EXAMINATION (FORM-18) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557-STATEMENT OF UNDERTAKING (FORM 3) [18-01-2023(online)].pdf | 18/01/2023 |
| 202347003557.pdf | 18/01/2023 |
