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EXPOSURE DEVICE, EXPOSURE METHOD AND PHOTOLITHOGRAPHY METHOD
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Abstract
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EXPOSURE DEVICE, EXPOSURE METHOD AND PHOTOLITHOGRAPHY METHOD
PCT NATIONAL PHASE APPLICATION
Published
Filed on 3 October 2018
Patent Information
| Application ID | 201847037263 |
| Date of Application | 03/10/2018 |
Documents
| Name | Date |
|---|---|
| 201847037263-IntimationOfGrant03-01-2024.pdf | 03/01/2024 |
| 201847037263-PatentCertificate03-01-2024.pdf | 03/01/2024 |
| 201847037263-FER.pdf | 17/10/2021 |
| 201847037263-CLAIMS [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-COMPLETE SPECIFICATION [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-FER_SER_REPLY [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-FORM 3 [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-Information under section 8(2) [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-OTHERS [05-07-2021(online)].pdf | 05/07/2021 |
| 201847037263-certified copy of translation [26-05-2021(online)].pdf | 26/05/2021 |
| 201847037263-FORM-26 [26-05-2021(online)].pdf | 26/05/2021 |
| 201847037263-FORM 3 [05-08-2019(online)].pdf | 05/08/2019 |
| 201847037263-FORM 3 [12-03-2019(online)].pdf | 12/03/2019 |
| abstract 201847037263.jpg | 09/10/2018 |
| Correspondence by Agent_Form1_05-10-2018.pdf | 05/10/2018 |
| 201847037263-CLAIMS UNDER RULE 1 (PROVISIO) OF RULE 20 [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-COMPLETE SPECIFICATION [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-DECLARATION OF INVENTORSHIP (FORM 5) [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-DRAWINGS [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-FORM 1 [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-FORM 18 [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-POWER OF AUTHORITY [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-PROOF OF RIGHT [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-REQUEST FOR EXAMINATION (FORM-18) [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-STATEMENT OF UNDERTAKING (FORM 3) [03-10-2018(online)].pdf | 03/10/2018 |
| 201847037263-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [03-10-2018(online)].pdf | 03/10/2018 |
