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“EUV PHOTOMASK AND METHOD OF FORMING MASK PATTERN USING THE SAME”
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Abstract
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Inventors
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Specification
Documents
“EUV PHOTOMASK AND METHOD OF FORMING MASK PATTERN USING THE SAME”
CONVENTIONAL APPLICATION
Published
Filed on 14 September 2021
Patent Information
| Application ID | 202124041326 |
| Date of Application | 14/09/2021 |
Documents
| Name | Date |
|---|---|
| Abstract1.jpg | 20/01/2022 |
| 202124041326-COMPLETE SPECIFICATION [14-09-2021(online)].pdf | 14/09/2021 |
| 202124041326-DECLARATION OF INVENTORSHIP (FORM 5) [14-09-2021(online)].pdf | 14/09/2021 |
| 202124041326-DRAWINGS [14-09-2021(online)].pdf | 14/09/2021 |
| 202124041326-FORM 1 [14-09-2021(online)].pdf | 14/09/2021 |
| 202124041326-POWER OF AUTHORITY [14-09-2021(online)].pdf | 14/09/2021 |
| 202124041326-STATEMENT OF UNDERTAKING (FORM 3) [14-09-2021(online)].pdf | 14/09/2021 |
