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"CUSPED PERMANENT MAGNET ELECTRON CYCLOTRON RESONANCE-PLASMA ENHANCED-FILM DEPOSITION AND ETCHING SYSTEM"

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"CUSPED PERMANENT MAGNET ELECTRON CYCLOTRON RESONANCE-PLASMA ENHANCED-FILM DEPOSITION AND ETCHING SYSTEM"

ORDINARY APPLICATION

Published

date

Filed on 30 September 2015

Patent Information

Application ID1029/KOL/2015
Date of Application30/09/2015

Documents

NameDate
1029-KOL-2015-(30-09-2015)-ABSTRACT.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-CLAIMS.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-DESCRIPTION (COMPLETE).pdf30/09/2015
1029-KOL-2015-(30-09-2015)-DRAWINGS.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-FORM-1.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-FORM-2.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-FORM-3.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-FORM-5.pdf30/09/2015
1029-KOL-2015-(30-09-2015)-FORM-9.pdf30/09/2015
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