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COPPER ASSISTED ANTI REFLECTION ETCHING OF SILICON SURFACES
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Abstract
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COPPER ASSISTED ANTI REFLECTION ETCHING OF SILICON SURFACES
PCT NATIONAL PHASE APPLICATION
Published
Filed on 10 September 2014
Patent Information
| Application ID | 7580/DELNP/2014 |
| Date of Application | 10/09/2014 |
Documents
| Name | Date |
|---|---|
| 7580-DELNP-2014-RELEVANT DOCUMENTS [23-06-2023(online)].pdf | 23/06/2023 |
| 7580-DELNP-2014-IntimationOfGrant08-06-2021.pdf | 08/06/2021 |
| 7580-DELNP-2014-PatentCertificate08-06-2021.pdf | 08/06/2021 |
| 7580-DELNP-2014-ABSTRACT [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-CLAIMS [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-CORRESPONDENCE [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-DRAWING [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-FER_SER_REPLY [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-OTHERS [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-PETITION UNDER RULE 137 [25-01-2019(online)].pdf | 25/01/2019 |
| 7580-DELNP-2014-FER.pdf | 01/08/2018 |
| 7580-delnp-2014-Assignment-(08-01-2015).pdf | 08/01/2015 |
| 7580-delnp-2014-Correspondence Others-(08-01-2015).pdf | 08/01/2015 |
| 7580-delnp-2014-GPA-(08-01-2015).pdf | 08/01/2015 |
| 7580-DELNP-2014.pdf | 02/10/2014 |
| FORM 2 + SPECIFICATION.pdf | 11/09/2014 |
| FORM 3.pdf | 11/09/2014 |
| FORM 5.pdf | 11/09/2014 |
| OTHER RELEVANT DOCUMENT.pdf | 11/09/2014 |
| PCT-IB-304.pdf | 11/09/2014 |
