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CERAMIC ENGINEERING BY GRADING MATERIALS
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Abstract
Information
Inventors
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Specification
Documents
CERAMIC ENGINEERING BY GRADING MATERIALS
PCT NATIONAL PHASE APPLICATION
Published
Filed on 28 October 2024
Abstract
Embodiments disclosed herein include a puck for an electrostatic chuck. In an embodiment, the puck comprises a substrate with a top surface and a bottom surface. In an embodiment, a first material composition is at the top surface of the substrate, and a second material composition is at the bottom surface of the substrate. In an embodiment, a composition gradient is provided through the substrate between the top surface and the bottom surface.
Patent Information
| Application ID | 202447082204 |
| Invention Field | ELECTRONICS |
| Date of Application | 28/10/2024 |
| Publication Number | 44/2024 |
Inventors
| Name | Address | Country | Nationality |
|---|---|---|---|
| CHADHA, Arvinder | 808 W. San Carlos Street, Unit 733 San Jose, CA 95126 | U.S.A. | U.S.A. |
| BEAUDRY, Christopher | 2575 Bobolink Drive San Jose, CA 95125 | U.S.A. | U.S.A. |
Applicants
| Name | Address | Country | Nationality |
|---|---|---|---|
| APPLIED MATERIALS, INC. | 3050 Bowers Avenue Santa Clara, CA 95054 | U.S.A. | U.S.A. |
Documents
| Name | Date |
|---|---|
| 202447082204-FORM-26 [29-10-2024(online)].pdf | 29/10/2024 |
| 202447082204-COMPLETE SPECIFICATION [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-DECLARATION OF INVENTORSHIP (FORM 5) [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-DRAWINGS [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-FORM 1 [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-FORM 18 [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-PRIORITY DOCUMENTS [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-PROOF OF RIGHT [28-10-2024(online)].pdf | 28/10/2024 |
| 202447082204-REQUEST FOR EXAMINATION (FORM-18) [28-10-2024(online)].pdf | 28/10/2024 |
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