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ATOMIC LAYER DEPOSITION WITH PLASMA SOURCE
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Abstract
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ATOMIC LAYER DEPOSITION WITH PLASMA SOURCE
PCT NATIONAL PHASE APPLICATION
Published
Filed on 13 September 2013
Patent Information
| Application ID | 8047/DELNP/2013 |
| Date of Application | 13/09/2013 |
Documents
| Name | Date |
|---|---|
| 8047-DELNP-2013-RELEVANT DOCUMENTS [29-09-2023(online)].pdf | 29/09/2023 |
| 8047-DELNP-2013-RELEVANT DOCUMENTS [26-09-2022(online)].pdf | 26/09/2022 |
| 8047-DELNP-2013-RELEVANT DOCUMENTS [23-09-2022(online)].pdf | 23/09/2022 |
| 8047-DELNP-2013-RELEVANT DOCUMENTS [12-07-2021(online)].pdf | 12/07/2021 |
| 8047-DELNP-2013-RELEVANT DOCUMENTS [30-01-2020(online)].pdf | 30/01/2020 |
| 8047-DELNP-2013-RELEVANT DOCUMENTS [27-03-2019(online)].pdf | 27/03/2019 |
| 8047-DELNP-2013-IntimationOfGrant30-11-2018.pdf | 30/11/2018 |
| 8047-DELNP-2013-PatentCertificate30-11-2018.pdf | 30/11/2018 |
| 8047-DELNP-2013-Correspondence-300818.pdf | 04/09/2018 |
| 8047-DELNP-2013-OTHERS-300818.pdf | 04/09/2018 |
| 8047-DELNP-2013-CLAIMS [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-DRAWING [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-FER_SER_REPLY [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-FORM 3 [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-Information under section 8(2) (MANDATORY) [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-PETITION UNDER RULE 137 [20-08-2018(online)]-1.pdf | 20/08/2018 |
| 8047-DELNP-2013-PETITION UNDER RULE 137 [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-Proof of Right (MANDATORY) [20-08-2018(online)].pdf | 20/08/2018 |
| 8047-DELNP-2013-FER.pdf | 26/02/2018 |
| 8047-DELNP-2013-FORM 3 [05-02-2018(online)].pdf | 05/02/2018 |
| 8047-DELNP-2013.pdf | 04/05/2016 |
| 8047-DELNP-2013-Correspondence-031114.pdf | 27/11/2014 |
| 8047-DELNP-2013-Form 3-031114.pdf | 27/11/2014 |
| 8047-delnp-2013-Claims.pdf | 11/03/2014 |
| 8047-delnp-2013-Correspondence-others.pdf | 11/03/2014 |
| 8047-delnp-2013-Form-1.pdf | 11/03/2014 |
| 8047-delnp-2013-Form-2.pdf | 11/03/2014 |
| 8047-delnp-2013-Form-3.pdf | 11/03/2014 |
| 8047-delnp-2013-Form-5.pdf | 11/03/2014 |
| 8047-delnp-2013-Correspondence-Others-(21-01-2014).pdf | 21/01/2014 |
| 8047-delnp-2013-Form-3-(21-01-2014).pdf | 21/01/2014 |
| 8047-delnp-2013-Correspondence Others-(07-11-2013).pdf | 07/11/2013 |
| 8047-delnp-2013-GPA-(07-11-2013).pdf | 07/11/2013 |
| 8047-delnp-2013-Correspondence-Others-(25-10-2013).pdf | 25/10/2013 |
| 8047-delnp-2013-Form-3-(25-10-2013).pdf | 25/10/2013 |
