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APPARATUS AND METHOD FOR THE AUTOMATED MANAGEMENT OF A PROCESSING CHAMBER WITH A CONTROLLED ATMOSPHERE
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Abstract
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APPARATUS AND METHOD FOR THE AUTOMATED MANAGEMENT OF A PROCESSING CHAMBER WITH A CONTROLLED ATMOSPHERE
PCT NATIONAL PHASE APPLICATION
Published
Filed on 2 November 2021
Patent Information
| Application ID | 202117050214 |
| Date of Application | 02/11/2021 |
Documents
| Name | Date |
|---|---|
| 202117050214-CLAIMS [23-10-2023(online)].pdf | 23/10/2023 |
| 202117050214-FER_SER_REPLY [23-10-2023(online)].pdf | 23/10/2023 |
| 202117050214-FORM 3 [23-10-2023(online)].pdf | 23/10/2023 |
| 202117050214-Information under section 8(2) [23-10-2023(online)].pdf | 23/10/2023 |
| 202117050214-OTHERS [23-10-2023(online)].pdf | 23/10/2023 |
| 202117050214-FER.pdf | 27/04/2023 |
| 202117050214-FORM 18 [22-02-2023(online)].pdf | 22/02/2023 |
| 202117050214-FORM 3 [22-02-2023(online)].pdf | 22/02/2023 |
| 202117050214-FORM 3 [04-03-2022(online)].pdf | 04/03/2022 |
| 202117050214-COMPLETE SPECIFICATION [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-DECLARATION OF INVENTORSHIP (FORM 5) [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-DRAWINGS [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-FIGURE OF ABSTRACT [02-11-2021(online)].jpg | 02/11/2021 |
| 202117050214-FORM 1 [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-FORM-26 [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-NOTIFICATION OF INT. APPLN. NO. & FILING DATE (PCT-RO-105-PCT Pamphlet) [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-PRIORITY DOCUMENTS [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-Proof of Right [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-STATEMENT OF UNDERTAKING (FORM 3) [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214-TRANSLATIOIN OF PRIOIRTY DOCUMENTS ETC. [02-11-2021(online)].pdf | 02/11/2021 |
| 202117050214.pdf | 02/11/2021 |
