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AN ATOMIC LAYER DEPOSITION REACTOR FOR PROCESSING A BATCH OF SUBSTRATES AND METHOD THEREOF
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Abstract
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Specification
Documents
AN ATOMIC LAYER DEPOSITION REACTOR FOR PROCESSING A BATCH OF SUBSTRATES AND METHOD THEREOF
PCT NATIONAL PHASE APPLICATION
Published
Filed on 19 May 2014
Patent Information
| Application ID | 4032/DELNP/2014 |
| Date of Application | 19/05/2014 |
Documents
| Name | Date |
|---|---|
| 4032-DELNP-2014-IntimationOfGrant03-04-2023.pdf | 03/04/2023 |
| 4032-DELNP-2014-PatentCertificate03-04-2023.pdf | 03/04/2023 |
| 4032-DELNP-2014-ABSTRACT [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-CLAIMS [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-CORRESPONDENCE [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-FER_SER_REPLY [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-OTHERS [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-PETITION UNDER RULE 137 [28-10-2019(online)].pdf | 28/10/2019 |
| 4032-DELNP-2014-FORM 3 [24-10-2019(online)].pdf | 24/10/2019 |
| 4032-DELNP-2014-Information under section 8(2) (MANDATORY) [24-10-2019(online)].pdf | 24/10/2019 |
| 4032-DELNP-2014-PETITION UNDER RULE 137 [24-10-2019(online)].pdf | 24/10/2019 |
| 4032-DELNP-2014-FORM 4(ii) [10-07-2019(online)].pdf | 10/07/2019 |
| 4032-DELNP-2014-FER.pdf | 28/01/2019 |
| 4032-DELNP-2014-Correspondence Others-(17-02-2015).pdf | 17/02/2015 |
| 4032-DELNP-2014-GPA-(17-02-2015).pdf | 17/02/2015 |
| 4032-DELNP-2014-Correspondence-241114.pdf | 09/12/2014 |
| 4032-DELNP-2014-Correspondence-071114.pdf | 03/12/2014 |
| 4032-DELNP-2014-Form 3-071114.pdf | 03/12/2014 |
| 4032-DELNP-2014.pdf | 10/07/2014 |
| DRAWINGS.pdf | 20/05/2014 |
| FORM 3.pdf | 20/05/2014 |
| FORM 5.pdf | 20/05/2014 |
| SPECIFICATION.pdf | 20/05/2014 |
