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ACOUSTIC WAVE DEVICES WITH RESONANCE-TUNED LAYER STACK AND METHOD OF MANUFACTURE
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ACOUSTIC WAVE DEVICES WITH RESONANCE-TUNED LAYER STACK AND METHOD OF MANUFACTURE
PCT NATIONAL PHASE APPLICATION
Published
Filed on 26 November 2024
Abstract
A bulk acoustic wave, BAW, (100) device with resonance-tuned layer stack is disclosed. The BAW device includes two acoustic resonators (102(A)), 102(B)) with top electrodes (104(A)), 104(B)) in different regions (108(A)), 108(B)) on a top side (STOP) of a piezoelectric layer (110). The BAW device includes an acoustic mirror (118) on a bottom side (SBOT) of the piezoelectric layer (110) and a bottom electrode (112) between the acoustic mirror (118) and the piezoelectric layer (110). The piezoelectric layer (110) includes a recess (114) in a second region (108(B)) on the bottom side (SBOT) of the piezoelectric layer (110). The bottom electrode (112) is disposed in the recess (114) on the bottom side (SBOT) of the piezoelectric layer (110). A distance (D1) between a first top electrode (104(A)) in a first region (108(A)) and the bottom electrode (112) may be greater than a distance (D2) between a second top electrode (104(B)) in the second region (108(B)) and the bottom electrode (112).
Patent Information
| Application ID | 202447092220 |
| Invention Field | ELECTRONICS |
| Date of Application | 26/11/2024 |
| Publication Number | 49/2024 |
Inventors
| Name | Address | Country | Nationality |
|---|---|---|---|
| SCHIEK, Maximilian | RF360 Singapore Pte. Ltd. 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
| CERANSKI, Christian | RF360 Singapore Pte. Ltd. 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
| METZGER, Thomas | RF360 Singapore Pte. Ltd. 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
| AIGNER, Willi | RF360 Singapore Pte. Ltd. 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
| STERR, Franz | RF360 Singapore Pte. Ltd. 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
Applicants
| Name | Address | Country | Nationality |
|---|---|---|---|
| RF360 SINGAPORE PTE. LTD. | 9 Raffles Place, #26-01 Republic Plaza, Singapore 048619 | Singapore | Singapore |
Documents
| Name | Date |
|---|---|
| 202447092220-COMPLETE SPECIFICATION [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-DECLARATION OF INVENTORSHIP (FORM 5) [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-DRAWINGS [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-FORM 1 [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-FORM 18 [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-PRIORITY DOCUMENTS [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-REQUEST FOR EXAMINATION (FORM-18) [26-11-2024(online)].pdf | 26/11/2024 |
| 202447092220-STATEMENT OF UNDERTAKING (FORM 3) [26-11-2024(online)].pdf | 26/11/2024 |
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