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A SYSTEM AND METHOD OF MEASURING SHEET RESISTANCE OF LARGE AREA DIFFUSED SI WAFER USING MULTIPLE FOUR PROBE TECHNIQUE
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A SYSTEM AND METHOD OF MEASURING SHEET RESISTANCE OF LARGE AREA DIFFUSED SI WAFER USING MULTIPLE FOUR PROBE TECHNIQUE
ORDINARY APPLICATION
Published
Filed on 27 February 2017
Patent Information
| Application ID | 201731006865 |
| Date of Application | 27/02/2017 |
Documents
| Name | Date |
|---|---|
| 201731006865-RELEVANT DOCUMENTS [28-09-2023(online)].pdf | 28/09/2023 |
| 201731006865-RELEVANT DOCUMENTS [23-08-2022(online)].pdf | 23/08/2022 |
| 201731006865-IntimationOfGrant12-07-2021.pdf | 12/07/2021 |
| 201731006865-PatentCertificate12-07-2021.pdf | 12/07/2021 |
| 201731006865-ABSTRACT [27-05-2020(online)].pdf | 27/05/2020 |
| 201731006865-CLAIMS [27-05-2020(online)].pdf | 27/05/2020 |
| 201731006865-COMPLETE SPECIFICATION [27-05-2020(online)].pdf | 27/05/2020 |
| 201731006865-FER_SER_REPLY [27-05-2020(online)].pdf | 27/05/2020 |
| 201731006865-OTHERS [27-05-2020(online)].pdf | 27/05/2020 |
| 201731006865-FER.pdf | 28/11/2019 |
| Form 18 [15-03-2017(online)].pdf | 15/03/2017 |
| Other Patent Document [08-03-2017(online)].pdf | 08/03/2017 |
| Description(Complete) [27-02-2017(online)].pdf | 27/02/2017 |
| Description(Complete) [27-02-2017(online)].pdf_276.pdf | 27/02/2017 |
| Drawing [27-02-2017(online)].pdf | 27/02/2017 |
| Form 1 [27-02-2017(online)].pdf | 27/02/2017 |
| Form 20 [27-02-2017(online)].pdf | 27/02/2017 |
| Form 3 [27-02-2017(online)].pdf | 27/02/2017 |
| Power of Attorney [27-02-2017(online)].pdf | 27/02/2017 |
