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A System And Method For Brightfield Inspection Of Circular Rotating Wafers
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Abstract
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A System And Method For Brightfield Inspection Of Circular Rotating Wafers
ORDINARY APPLICATION
Published
Filed on 19 January 2022
Patent Information
| Application ID | 202241003016 |
| Date of Application | 19/01/2022 |
Documents
| Name | Date |
|---|---|
| 202241003016-FORM 3 [14-10-2022(online)].pdf | 14/10/2022 |
| 202241003016-Proof of Right [22-02-2022(online)].pdf | 22/02/2022 |
| 202241003016-Response to office action [18-02-2022(online)].pdf | 18/02/2022 |
| 202241003016-Covering Letter [24-01-2022(online)].pdf | 24/01/2022 |
| 202241003016-Form 1 (Submitted on date of filing) [24-01-2022(online)].pdf | 24/01/2022 |
| 202241003016-Power of Attorney [24-01-2022(online)].pdf | 24/01/2022 |
| 202241003016-COMPLETE SPECIFICATION [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-DECLARATION OF INVENTORSHIP (FORM 5) [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-DRAWINGS [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-FORM 1 [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-FORM 18 [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-POWER OF AUTHORITY [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-REQUEST FOR EXAMINATION (FORM-18) [19-01-2022(online)].pdf | 19/01/2022 |
| 202241003016-STATEMENT OF UNDERTAKING (FORM 3) [19-01-2022(online)].pdf | 19/01/2022 |
