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A SYSTEM FOR GRIPPING SILICON WAFERS FOR PHOTOLITHOGRAPHY PROCESS
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Abstract
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A SYSTEM FOR GRIPPING SILICON WAFERS FOR PHOTOLITHOGRAPHY PROCESS
ORDINARY APPLICATION
Published
Filed on 15 September 2021
Patent Information
| Application ID | 202141041708 |
| Date of Application | 15/09/2021 |
Documents
| Name | Date |
|---|---|
| 202141041708-Correspondence_Form1, Power of Attorney_23-12-2021.pdf | 23/12/2021 |
| 202141041708-FORM-26 [14-12-2021(online)].pdf | 14/12/2021 |
| 202141041708-Proof of Right [14-12-2021(online)].pdf | 14/12/2021 |
| 202141041708-COMPLETE SPECIFICATION [15-09-2021(online)].pdf | 15/09/2021 |
| 202141041708-DECLARATION OF INVENTORSHIP (FORM 5) [15-09-2021(online)].pdf | 15/09/2021 |
| 202141041708-DRAWINGS [15-09-2021(online)].pdf | 15/09/2021 |
| 202141041708-FIGURE OF ABSTRACT [15-09-2021(online)].jpg | 15/09/2021 |
| 202141041708-FORM 1 [15-09-2021(online)].pdf | 15/09/2021 |
