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A PROCESS FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES COMPRISING THE CHEMICAL MECHANICAL POLISHING OF ELEMENTAL GERMANIUM AND/OR SI1 XGEX MATERIAL IN THE PRESENCE OF A CMP COMPOSITION HAVING A PH VALUE OF 3.0 TO 5.5
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A PROCESS FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES COMPRISING THE CHEMICAL MECHANICAL POLISHING OF ELEMENTAL GERMANIUM AND/OR SI1 XGEX MATERIAL IN THE PRESENCE OF A CMP COMPOSITION HAVING A PH VALUE OF 3.0 TO 5.5
PCT NATIONAL PHASE APPLICATION
Published
Filed on 28 February 2014
Patent Information
| Application ID | 1603/CHENP/2014 |
| Date of Application | 28/02/2014 |
Documents
| Name | Date |
|---|---|
| 1603-CHENP-2014-AbandonedLetter.pdf | 25/11/2019 |
| 1603-CHENP-2014-FER.pdf | 22/05/2019 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 20-08-2015.pdf | 20/08/2015 |
| 1603-CHENP-2014 FORM-3 20-08-2015.pdf | 20/08/2015 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 21-04-2015.pdf | 21/04/2015 |
| 1603-CHENP-2014 FORM-3 21-04-2015.pdf | 21/04/2015 |
| 1603-CHENP-2014 FORM-3 27-11-2014.pdf | 27/11/2014 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 27-11-2014.pdf | 27/11/2014 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 02-07-2014.pdf | 02/07/2014 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 25-06-2014.pdf | 25/06/2014 |
| 1603-CHENP-2014 FORM-3 25-06-2014.pdf | 25/06/2014 |
| 1603-CHENP-2014.pdf | 05/03/2014 |
| 1603-CHENP-2014 FORM-2 FIRST PAGE 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 POWER OF ATTORNEY 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 CLAIMS 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 CLAIMS SIGNATURE LAST PAGE 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 CORRESPONDENCE OTHERS 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 DESCRIPTION (COMPLETE) 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 FORM-1 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 FORM-3 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 FORM-5 28-02-2014.pdf | 28/02/2014 |
| 1603-CHENP-2014 PCT PUBLICATION 28-02-2014.pdf | 28/02/2014 |
